MAT SCI 123: Semiconductor Processing

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About this Guide

A guide to literature searching for MSE123.

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Find Books and More

OskiCat is the catalog for UC Berkeley and includes all libraries on campus. Start with a keyword search, and then use subject headings for additional searching. The records will tell you the call number and location (library) for each book.

Some suggested books for learning more about semiconductor processing and devices include:

Compound Semiconductor Technology / D. J. Colliver. Artech House, 1976.
TK7871.99.C65.C64 1976

Electronic Materials Science for Integrated Circuits in Si and GaAs / J. W. Mayer, S. S. Lau. Macmillan, 1990.
TK7871.9.M388 1990

Fundamentals of Semiconductors : Physics and Materials Properties / Peter Y. Yu, Manuel Cardona. 1st ed., corr. print. Springer, 1996.
QC611.Y88 1996b Reserve
3rd edition available online  (UCB access only)
4th edition available online  (UCB access only)

Introduction to Microelectronic Fabrication / R. C. Jaeger. 2nd ed. Prentice-Hall, 2002.
TK7874.J33 2002

Introduction to Solid State Physics / C. Kittel. 7th ed. Wiley, 1996.
QC176.K531 1996 (Physics-Astronomy Library)

Introduction to Solid State Physics / Charles Kittel. 8th ed. Wiley, c2005.
QC176.K5 2005

Nanostructures and Nanomaterials : Synthesis, Properties and Applications / Guozhong Cao. Imperial College Press, c2004.
QC176.8.N35.C36 2004
Available online  (UCB access only)

The Physics and Chemistry of Materials / Joel I. Gersten, Frederick W. Smith. Wiley, c2001.
QD478.G47 2001

Physics of Semiconductor Devices / S. M. Sze. 3rd ed. Wiley, 2007.
TK7871.85.S988 2007

Principles of Growth and Processing of Semiconductors / S. Mahajan, K. S. Sree Harsha. McGraw-Hill, 1999.
TK7871.85.M295 1999

The Science and Engineering of Microelectronic Fabrication / S. A. Campbell. 3rd ed. Oxford University Press, 2008.
TK7871.85.C25 2008

Semiconductor Silicon Crystal Technology / F. Shimura. Academic Press, 1988.
TK7871.85.S5231 1988

VLSI Fabrication Principles: Silicon and Gallium Arsenide / S. K. Ghandhi. 2nd ed. Wiley, 1994.
TK7874.G473 1994

VLSI Technology / S. M. Sze (editor). 2nd ed. McGraw-Hill, 1988.
TK7874.V5661 1988


crcnetbase logo
A keyword searchable collection of engineering handbooks and textbooks from CRC Press, a major science and engineering publisher. The collection is also browsable, and includes a category on nanoscience/nanotechnology.

knovel logo
A collection of full-text engineering and scientific handbooks and databases, with built-in software tools.

More eBooks

Online handbooks

Many of our handbooks and encyclopedias are available online. See our ebooks page for more encyclopedias and handbooks.

Encyclopedia of Materials: Science and Technology 2001. Edited by K.H. Jurgen Buschow. Read at Google Read at Google

CRC Handbook of Chemistry and Physics 91st Ed. 2010-2011. Read at Google Read at Google

CRC Materials Science and Engineering Handbook 3rd Ed. 2001. Edited by Janes F. Shackelford and William Alexander Read at Google Read at Google

Find Articles

Journal articles and conference papers are the primary means of disseminating research in engineering. Use these article databases to find journal articles and conference papers relevant to your research.

Conference Papers

Conference proceedings and papers may be published in various ways: as separate, one-time publications; as serials; or as special issues in journals. Sometimes only the abstract is published; sometimes the paper may be obtained only by contacting the author or society; sometimes the full text is on the web. Occasionally the papers are never published but may be cited by authors who attended the meetings. As a result of these variations, locating conference proceedings can be complicated.

If you're having trouble finding a conference paper, consult our How to Find Conference Proceedings guide, or contact us at the Engineering Library.

Selected Research Journals

Browse research journals in your field to identify interesting topics.

Find call numbers and locations for print copies by searching the journal titles in OskiCat.

Selected Semiconductor Journals

Selected Related Journals

Citation Management Tools

Reference managers help you manage your research, collect and cite sources, & create bibliographies in a variety of citation styles.  Compare.

Widely used citation managers include:

: Free for UC Berkeley users. Web-based manager with direct export integrated into many databases. Organize and share references, and format citations and bibliographies.
Sign up for a RefWorks account.
Getting Started with RefWorks

: may be purchased from UC Berkeley's Software Central. Good PDF management and annotation tools. Automatically searches for full-text PDFs (if available) for citations. Formats citations and bibliographies. Requires purchase of annual or semi-annual upgrades to remain current.

: Free plug-in for Firefox and standalone versions for Chrome and Internet Explorer. Automatically extracts metadata from many PDFs and web pages. Permits tagging, notation, and full text searching of your library of resources. Integrates with Word for citation and bibliography formatting, and has a free (but limited) web backup service.Getting Started with Zotero Note: When using software to automatically format your citations, double-check the formatting for correctness.

: Free (up to 2GB). Web-based component that syncs with a desktop client. Integrates with Word for citation and bibliography formatting. Includes some social elements that allows for sharing and recommendations.

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