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OskiCat is the catalog for UC Berkeley and includes all libraries on campus. Start with a keyword search, and then use subject headings for additional searching. The records will tell you the call number and location (library) for each book.
Some suggested books for learning more about semiconductor processing and devices include:
Compound Semiconductor Technology / D. J. Colliver. Artech House, 1976.
Electronic Materials Science for Integrated Circuits in Si and GaAs / J. W. Mayer, S. S. Lau. Macmillan, 1990.
Fundamentals of Semiconductors : Physics and Materials Properties / Peter Y. Yu, Manuel Cardona. 1st ed., corr. print. Springer, 1996.
QC611.Y88 1996b Reserve
3rd edition available online (UCB access only)
4th edition available online (UCB access only)
Introduction to Microelectronic Fabrication / R. C. Jaeger. 2nd ed. Prentice-Hall, 2002.
Introduction to Solid State Physics / C. Kittel. 7th ed. Wiley, 1996.
QC176.K531 1996 (Physics-Astronomy Library)
Introduction to Solid State Physics / Charles Kittel. 8th ed. Wiley, c2005.
Nanostructures and Nanomaterials : Synthesis, Properties and Applications / Guozhong Cao. Imperial College Press, c2004.
Available online (UCB access only)
The Physics and Chemistry of Materials / Joel I. Gersten, Frederick W. Smith. Wiley, c2001.
Physics of Semiconductor Devices / S. M. Sze. 3rd ed. Wiley, 2007.
Principles of Growth and Processing of Semiconductors / S. Mahajan, K. S. Sree Harsha. McGraw-Hill, 1999.
The Science and Engineering of Microelectronic Fabrication / S. A. Campbell. 3rd ed. Oxford University Press, 2008.
Semiconductor Silicon Crystal Technology / F. Shimura. Academic Press, 1988.
VLSI Fabrication Principles: Silicon and Gallium Arsenide / S. K. Ghandhi. 2nd ed. Wiley, 1994.
VLSI Technology / S. M. Sze (editor). 2nd ed. McGraw-Hill, 1988.
A keyword searchable collection of engineering handbooks and textbooks from CRC Press, a major science and engineering publisher. The collection is also browsable, and includes a category on nanoscience/nanotechnology.
Many of our handbooks and encyclopedias are available online. See our ebooks page for more encyclopedias and handbooks.
Encyclopedia of Materials: Science and Technology 2001. Edited by K.H. Jurgen Buschow.
CRC Handbook of Chemistry and Physics 91st Ed. 2010-2011.
CRC Materials Science and Engineering Handbook 3rd Ed. 2001. Edited by Janes F. Shackelford and William Alexander